A new analytical model to estimate the voltage value and. The objective of the present paper is to represent a novel method to investigate the stable and unstable behaviors of fully clamped rectangular nanomicroplates under the effects of electrostatic and casimir pressures. A 3d model exploiting bilateral symmetry of this variable capacitor is built in comsol multiphysics software. Static analysis of electrostatically actuated micro cantilever beam the microbeam requires mechanical energy to obtain a vibrating or translating motion based on the application of mems. In this study, a new analytical model is developed for an electrostatic microelectromechanical system mems cantilever actuator to establish a relation between the displacement of its tip and the applied voltage. They take the stray capacitances into consideration, but they announce the pullin action for y d 0 3 which is valid for parallelplate case. Static and dynamic analysis is carried out using a simulation technique based on finite element method using comsol multiphysics. To start a new discussion with a link back to this one, click here.
This paper investigates the parametric resonance of electrostatically actuated microelectromechanicalsystems mems cantilever resonators. Modeled electroformed mems variable capacitors for cobalt. Electrostatically actuated cantilever using finite element method nicholas deroller, muhammad qazi, jie liu, and. Lin 3 1 arizona state university, department of electrical engineering, tempe, az 85287 2 freescale semiconductor, sensor and analog products division, tempe, az 85284. The presented model consists of two stationary electrodes in the same plane along with a flexible electrode above and in the middle of the two electrodes. Comsol software users who are onsubscription should submit their questions via the. Electrostatically actuated cantilever in the model library and our online model gallery, you can find several comsol multiphysics example models relevant to adaptive optics systems. In order to fully evaluate whether or not the comsol multiphysics software will meet your requirements, you need to. The model solves the deformation of the beam under an applied voltage. Prediction of pullin phenomena and structural stability. Electrostatically actuated cantilever on comsol youtube.
Pullin voltage analysis of electrostatically actuated beam. Comsol multiphysics software understand, predict, and optimize. For instance, the model of the electrostatically actuated cantilever shows the bending of an elastic cantilever beam due to electrostatic forces. Pdf mechanical behavior simulation of memsbased cantilever. Apr 22, 2020 in this work, the design and fabrication of electrostatically actuated polydimethylsiloxane pdms mems cantilever on flexible pdms substrate is presented.
May 17, 2016 the present study is concerned with the theoretical investigation of pullin phenomena and their significance for assessing structural instability of a mems switch, modeled as electrostatically actuated micro cantilever beam coupled with a rigid plate. Pdf static analysis of electrostatically actuated micro. For simplicity, this example uses the relaxationbased algorithm rather than the newton method to. A simulation of an electrostatically actuated cantilever beam is also reported in this paper which is commonly used in rf switches. Static analysis of electrostatically actuated micro. The nonlinear electrostatic force was valuated via numerical methods implemented in comsol software where threedimensional simulations were performed for different gaps.
Characterization of an algangan electrostatically actuated. Use this model or demo application file and its accompanying instructions as a starting point for your own simulation work. To this end, the governing partial differential equation of equilibrium is considered and reduced to an algebraic equation using a simple and computationally efficient single. Warning your internet explorer is in compatibility mode and may not be displaying the website correctly. Feasibility study of a resonant accelerometer with. Lakshmoji kosuru assistant professor gitam university. If you still need help with comsol and have an onsubscription license, please visit our support center for help. This stepbystep instructional video shows you how the electromechanics interface in comsol multiphysics couples and solves mechanical and electrical problems.
Aug 28, 2007 hi everyone, ive just started to use comsol for the study of a simple cantilever beam and im facing some problems while calculating the eigenfrequencies and the frequencyresponse. Viscoelastic and silicon nitride microbeams are fabricated and are electrostatically actuated by various electrode configurations to trigger the first, second, and third modes. A simulation of an electrostatically actuated mems resonator using the electromechanics interface of the mems module. Improving the power of optical systems via component design.
Electrostatically actuated cantilever comsol multiphysics. This model shows the bending of a cantilever beam under an applied electrostatic load. To help the learning process, there is a streamlined. How to model electromechanics in comsol multiphysics. Sayanu pamidighantam 1, robert puers 2, kris baert 1 and harrie a c tilmans 1. Figure 1 shows profile of surface electric potential and figure 2 profile of surface total displacement of zcomponent. Journal of nanoscience hindawi publishing corporation. Model of the cantilever actuated by fringing electrostatic field 2. The comsol simulation software computes the electrostatic forces in a selfconsistent manner throughout the process. Comsol multiphysics based on finite element method. Simulation and analysis of actuation voltage of electrostatically actuated rf mems cantilever switch abstract.
Mechanical behavior simulation of memsbased cantilever. Pullin voltage analysis of electrostatically actuated beam structures with fixedfixed and fixedfree end conditions. As i am very new to comsol multiphysics, its very difficult for me to find the. Displacement in an electrostatically actuated cantilever. Also an electrostatically actuated cantiliver beam was simulated to see the. It always pops up a dialog says undefined value found in the equation residual vector. Static analysis using comsol multiphysics finite element package is done to validate the results. Us patent for electrostatically actuated torsional resonant. This application is a continuation of international application no. Comsol is the developer of comsol multiphysics software, an interactive environment for modeling and simulating scientific and engineering problems. Introduction the elastic cantilever beam is an elementary structure. The switch simulated in this research was using electrostatic actuation method.
Download the latest updates to comsol multiphysics software. Governing equations of an electrostatically actuated clampedclamped and a cantilever narrow microbeam. The physical parameters of the cantilever were analysed and optimised using taguchi method coupled with comsol multiphysics software. For the love of physics walter lewin may 16, 2011 duration. The microscopic size of mems devices accounts for strong coupling effects which arise between the different physical fields and forces. In this work, a 3d model of an electrostatically actuated micro cantilever has been developed using comsol for characterization using the finite element method fem. Electrostatically actuated mems relay arrays for highpower. Characterization of an algangan electrostatically actuated cantilever using finite element method. The capacitor is set up to be actuated both magnetically and electrostatically via a. The convergence problems for au electrostatically actuated cantilever. This paper presents a matrix configuration of electrostatically actuated microcantilever relay arrays that are connected in parallel to shunt high currents to individual relay elements. The elastic cantilever beam is one of the elementary structures used in mems designs. Mechanical behavior simulation of memsbased cantilever beam. Comsol access is a service we provide to our users and prospects.
Parametric resonance of electrostatically actuated mems. Comparison the various design of cantilever mems switch using. Comparison the various design of cantilever mems switch. The microcantilever has algangan hfet embedded on its base. This investigation envisages the static practical response of a cantilever beam mechanically actuated utilizing piezoceramic patches.
This paper presents the studies of mechanical behavior of mems cantilever beam made of polysilicon material, using the coupling of three application modes plane strain, electrostatics and the moving mesh of comsol multiphysics software. Comsol software is used in multi physics environment. This is, i think, a fairly conventional electrostatically actuated micromechanical relay application, and it would be nice to see it work. Design considerations of a mems cantilever beam switch for. This publication deals with the design of carbon nanotubes cnt based nanoelectromechanical system nems consisting in a variable capacitor working at microwave frequencies. Finite element analysis of electrostatically actuated mems. This paper deals with the analysis of structural mechanical properties of electrostatically driven prestressedmicromirrorusing comsol multiphysics 4. A side electrode of length l s and thickness d s is located at the distance g. When the voltage v is applied across the two electrodes, electrostatic force is generated.
So, i have applied the voltage on the top plate and grounded the bottom plate. To model a mems device, you first define the geometry in the software, either by using the native modeling tools of comsol, or by importing a cad model. I build a model to estimate the bending loss of a optical waveguide. They are usually 1 to 3 mm in size, fabricated from single crystalline silicon and mostly are electrostatically actuated. Excerpt from the roceedings of the comsol conference 2010 oston. Mems software for mictroelectricalmechanical systems. Published 19 june 2002 journal of micromechanics and microengineering, volume 12, number 4. Static analysis of electrostatically actuated micro cantilever beam. The goal of experiment here was to investigate the response of an electrostatically deflected, piezo actuated rigid cantilever aluminium beam. Stability analysis of an electrostatically actuated out of. Micromirrors are essential parts of microswitches in fiber optic network telecommunication. The capacitor is comprised of copper electrical connections, an actuation electrode, a bottom capacitor plate, an anchor post, and a top capacitor plate attached to the end of a suspended bimorph cantilever. Each software update is a small download that updates your current installation.
Different designs and parameters such as the air gap, cantilever thickness and young modulus value depends on different material have been chosen for analysing the actuation voltage. The cantilevers playing a key role in micro electro. In this work, the design and fabrication of electrostatically actuated polydimethylsiloxane pdms mems cantilever on flexible pdms substrate is presented. Pullin voltage evaluation is significant for the design of electrostatically actuated mems devices. This device is based on an array of moveable cnt cantilever electrostatically actuated over a ground plane figure 1 and 2. The damping characteristic and the resonance frequency of these modes are examined for a wide. Jun 18, 2014 this stepbystep instructional video shows you how the electromechanics interface in comsol multiphysics couples and solves mechanical and electrical problems. Using the same electromechanics interface, you can also perform a modal, frequency, and transient analysis of a mems cantilever. Comsol multiphysics software been used to simulate the switch. How to apply load and actuation voltage to a beam in comsol. In this model i make an accurate modeling for electrostatically actuated cantilever on. Different designs and parameters such as the air gap, cantilever thickness and young modulus value depends on different material have been chosen for analysing the. In this model i make an accurate modeling for electrostatically actuated cantilever on comsol to study its behavior. The essential factors such as geometric and inertial nonlinearities, higherorder distribution of electrostatic pressure, and nonlinear squeeze.
The electrostatic force is modeled to include fringe effect. Design and optimization of electrostatically actuated. Aug 03, 2015 for the love of physics walter lewin may 16, 2011 duration. Another significant limiting factor is the high contact resistance resulted from the low driving force, which is provided by microactuators. An electric charge is created around the electric field due to potential difference between two conductors refer figure 2. I am new to comsol and am trying to model an electrostatically actuated cantilever where the beam is thicker near the tip than at the anchor.
How to set up and run a simulation with comsol multiphysics a proper introduction on how to set up and run a model in comsol multiphysics is essential when learning how to use the software. I have to find displacement in plate due to the applied voltage. An equivalentcircuit model for mems electrostatic actuator using opensource software qucs article in ieice electronics express 65. Modelling of cantilever beam is done in multiphysics environment. I am new to comsol and presently trying to simulate the pullin instability of electrostatically actuated micro beams in comsol mems module. If you want to import mechanical cad models, you can do so by using the cad import module or one of the livelink products for cad. Modeling with comsol multiphysics means being able to move between simulating electromagnetics, structural mechanics, acoustics, fluid flow, heat transfer, and chemical reactions phenomena, or any other physics modeled by a system of pdes, in one software environment. In this work simple closed form models are derived for computation of pullin voltage of cantilever beams. Electrostatically actuated cantilever electrostatics. A 3d model of an electrostatically actuated micro cantilever has been developed for characterization using the finite element method. I need further insights into the following topics pertaining to this problem. Comsol software users who are onsubscription should submit their questions via the support center for a. Can anyone tell me the steps to apply the load and actuation voltage to the beam. This discussion is about an older version of the comsol multiphysics software.
Design and fabrication of pdmsbased electrostatically. An electrostatically actuated micro cantilever beam is schematically shown in figure 3. Comsol webinar modeling coils and electric devices. In his keynote talk at the comsol conference 2018 lausanne, andri bezzola of.
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